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Gayn Erickson\u79f0\uff0c\u7528\u4e8e\u7535\u52a8\u6c7d\u8f66\u7684SiC\u529f\u7387\u534a\u5bfc\u4f53\u7684\u6676\u5706\u7ea7\u6d4b\u8bd5\u548c\u8001\u5316\u662fAehr\u53bb\u5e74\u4e1a\u52a1\u7684\u5173\u952e\u9a71\u52a8\u56e0\u7d20\uff0cAehr\u4ecd\u7136\u79ef\u6781\u4e0e\u5927\u91cf\u65b0\u7684\u6f5c\u5728SiC\u5668\u4ef6\u548c\u6a21\u5757\u4f9b\u5e94\u5546\u63a5\u89e6\uff0c\u4ee5\u6ee1\u8db3\u4ed6\u4eec\u7684\u9884\u671f\u4ea7\u80fd\u9700\u6c42\u3002\u5c55\u671b2025\u8d22\u5e74\uff0cAehr\u9884\u8ba1SiC\u5c06\u7ee7\u7eed\u6210\u4e3a\u5176\u6536\u5165\u7684\u5173\u952e\u8d21\u732e\u8005\u3002<\/p>\n
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Aehr\u900f\u9732\uff0c\u5ba2\u6237\u662f\u4e00\u5bb6\u5e74\u6536\u5165\u6570\u5341\u4ebf\u7f8e\u5143\u7684\u5168\u7403\u534a\u5bfc\u4f53\u516c\u53f8\uff0c\u4e1a\u52a1\u904d\u53ca\u6b27\u6d32\u3001\u4e9a\u6d32\u548c\u7f8e\u6d32\uff0c\u670d\u52a1\u4e8e\u6c7d\u8f66\u3001\u5de5\u4e1a\u3001\u79fb\u52a8\u548c\u6d88\u8d39\u5e94\u7528\u7b49\u591a\u4e2a\u884c\u4e1a\u3002<\/p>\n
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Axcelis\u603b\u88c1\u517c\u9996\u5e2d\u6267\u884c\u5b98Russell Low\u8868\u793a\uff0c\u7531\u4e8e\u5168\u7403\u7684\u82af\u7247\u5236\u9020\u5546\u7ee7\u7eed\u4f9d\u8d56Axcelis\u7684Purion\u5e73\u53f0\u6765\u652f\u6301\u5176\u8fd0\u8425\uff0cAxcelis\u5b9e\u73b0\u4e86\u7a33\u5065\u7684\u5b63\u5ea6\u4e1a\u7ee9\u3002<\/p>\n
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