{"id":69189,"date":"2024-08-19T13:58:04","date_gmt":"2024-08-19T05:58:04","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=69189"},"modified":"2024-12-27T15:40:39","modified_gmt":"2024-12-27T07:40:39","slug":"%e7%a2%b3%e5%8c%96%e7%a1%85%ef%bc%8c%e8%b7%a8%e5%85%a5%e9%ab%98%e9%80%9f%e8%bd%a8%e9%81%93","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/Company\/newsdetail-69189.html","title":{"rendered":"\u78b3\u5316\u7845\uff0c\u8de8\u5165\u9ad8\u901f\u8f68\u9053"},"content":{"rendered":"

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\u636e\u4e86\u89e3\uff0c\u539f\u5b50\u5c42\u6c89\u79ef\uff08Atomic Layer Deposition\uff0c\u7b80\u79f0ALD\uff09\u662f\u4e00\u79cd\u8584\u819c\u6c89\u79ef\u6280\u672f\uff0c\u53ef\u5f52\u4e8e\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u5927\u7c7b\u3002\u76f8\u5bf9\u4e8e\u4e00\u822c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff0c\u5176\u5177\u6709\u72ec\u7279\u7684\u8868\u9762\u81ea\u9650\u5236\u5316\u5b66\u6548\u5e94\uff0c\u56e0\u800c\u53ef\u4ee5\u9010\u4e2a\u539f\u5b50\u5c42\u751f\u957f\u5404\u79cd\u5316\u5408\u7269\u6216\u5355\u8d28\u8584\u819c\u6750\u6599\uff0c\u5b9e\u73b0\u66f4\u7cbe\u786e\u7684\u539a\u5ea6\u63a7\u5236\uff0c\u53ef\u7528\u4e8e\u5404\u7c7b\u886c\u5e95\u6750\u6599\u7684\u8584\u819c\u6c89\u79ef\u3002<\/p>\n

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\u8fd1\u65e5\uff0c\u745e\u798f\u82af\u79d1\u6280\u4e0e\u6c5f\u82cf\u4e1c\u53f0\u9ad8\u65b0\u533a\u7b7e\u5b9a\u4e86\u300a\u8f66\u89c4\u7ea7SiC\u534a\u5bfc\u4f53\u529f\u7387\u6a21\u5757\u4ea7\u4e1a\u5316\u9879\u76ee\u6218\u7565\u5408\u4f5c\u6846\u67b6\u534f\u8bae\u300b\u3002\u745e\u798f\u82af\u79d1\u6280\u62df\u843d\u5730\u6c5f\u82cf\u4e1c\u53f0\u9ad8\u65b0\u533a\uff0c\u6295\u8d4410-15\u4ebf\u5143\u5efa\u8bbe\u7b2c\u4e8c\u7814\u53d1\u4e2d\u5fc3\u548c\u4ea7\u4e1a\u5316\u751f\u4ea7\u57fa\u5730\uff0c\u9996\u671f\u542f\u52a8\u8d44\u91d1\u6295\u51651\u4ebf\u5143\u3002<\/p>\n

\u8d44\u6599\u663e\u793a\uff0c\u745e\u798f\u82af\u79d1\u6280\u6210\u7acb\u4e8e2022\u5e7410\u6708\uff0c\u6ce8\u518c\u8d44\u672c1000\u4e07\u4eba\u6c11\u5e01\uff0c\u7ecf\u8425\u8303\u56f4\u542b\u534a\u5bfc\u4f53\u5206\u7acb\u5668\u4ef6\u5236\u9020\u3001\u534a\u5bfc\u4f53\u5206\u7acb\u5668\u4ef6\u9500\u552e\u3001\u7535\u5b50\u5143\u5668\u4ef6\u5236\u9020\u3001\u7535\u529b\u7535\u5b50\u5143\u5668\u4ef6\u5236\u9020\u7b49\u3002\u745e\u798f\u82af\u79d1\u6280\u5df2\u5efa\u7acb\u9884\u8ba1\u5e74\u4ea730\u4e07\u53ea\u7684\u6a21\u5757\u5de5\u5382\uff0c\u4e3b\u8981\u4ea7\u54c1\u4e3a\u8f66\u7528SiC MOS\u529f\u7387\u6a21\u5757\u3002<\/p>\n

2023\u5e742\u6708\uff0c\u745e\u798f\u82af\u79d1\u6280\u4e0e\u7231\u4ed5\u7279\u7b7e\u7f72\u6218\u7565\u5408\u4f5c\u534f\u8bae\uff0c\u5171\u540c\u63a8\u52a8SiC\u529f\u7387\u6a21\u5757\u5728\u65b0\u80fd\u6e90\u6c7d\u8f66\u9886\u57df\u7684\u5e94\u7528\u3002\u6839\u636e\u534f\u8bae\uff0c\u5728\u672a\u6765\u6570\u5e74\u5185\uff0c\u745e\u798f\u82af\u79d1\u6280\u751f\u4ea7\u7684SiC MOS\u6a21\u5757\u5c06\u5168\u90e8\u91c7\u7528\u7231\u4ed5\u7279\u7684SiC MOS\u82af\u7247\uff0c\u7231\u4ed5\u7279\u5c06\u4e3a\u745e\u798f\u82af\u79d1\u6280\u6279\u91cf\u4f9b\u5e94\u8f66\u7528\u529f\u7387\u6a21\u5757\u6240\u9700\u76841200V\/17m\u03a9\u53ca1700V\/17m\u03a9\u7684SiC MOS\u82af\u7247\uff0c\u5e76\u534f\u52a9\u745e\u798f\u82af\u79d1\u6280\u5efa\u8bbe\u6a21\u5757\u5de5\u5382\uff0c\u4fdd\u8bc1\u5176\u540e\u7eed\u7684\u91cf\u4ea7\u9700\u6c42\u3002<\/p>\n

\u6c5f\u82cf\u6676\u5de5\uff1a\u7533\u8bf7\u6269\u5efa30\u4ea9\u78b3\u5316\u7845\u76f8\u5173\u8bbe\u5907\u751f\u4ea7\u57fa\u5730<\/strong><\/p>\n

8\u670811\u65e5\uff0c\u636e\u5357\u901a\u65e5\u62a5\u6d88\u606f\uff0c\u6c5f\u82cf\u6676\u5de5\u534a\u5bfc\u4f53\u8bbe\u5907\u6709\u9650\u516c\u53f8\uff08\u4ee5\u4e0b\u7b80\u79f0\u201c\u6c5f\u82cf\u6676\u5de5\u201d\uff09\u6b63\u5f0f\u5411\u56ed\u533a\u63d0\u4ea4\u4e86\u5efa\u8bbe30\u4ea9\u751f\u4ea7\u57fa\u5730\u7684\u7533\u8bf7\u3002<\/p>\n

\u636e\u62a5\u9053\uff0c\u6c5f\u82cf\u6676\u5de5\u8ba1\u5212\u901a\u8fc7\u6269\u5927\u751f\u4ea7\u89c4\u6a21\uff0c\u8fdb\u4e00\u6b65\u63d0\u5347\u6676\u5706\u5012\u89d2\u673a\u7b49\u6838\u5fc3\u4ea7\u54c1\u7684\u4ea7\u80fd\u4e0e\u54c1\u8d28\uff0c\u6ee1\u8db3\u56fd\u5185\u5916\u5e02\u573a\u5bf9\u9ad8\u7aef\u534a\u5bfc\u4f53\u8bbe\u5907\u65e5\u76ca\u589e\u957f\u7684\u9700\u6c42\u3002<\/p>\n

\u5b98\u7f51\u8d44\u6599\u663e\u793a\uff0c\u6c5f\u82cf\u6676\u5de5\u4f4d\u4e8e\u6c5f\u82cf\u7701\u5357\u901a\u5e02\u542f\u4e1c\u5e02\u542f\u4e1c\u7ecf\u6d4e\u5f00\u53d1\u533a\uff0c\u516c\u53f8\u81f4\u529b\u4e8e\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u7814\u53d1\u548c\u5236\u9020\uff0c\u73b0\u5df2\u81ea\u4e3b\u7814\u5236\u51fa4-8\u82f1\u5bf8\u548c12\u82f1\u5bf8\u7684\u5168\u81ea\u52a8\u5012\u89d2\u673a\u3001\u5168\u81ea\u52a8\u6676\u5706\u5355\u7247\u6e05\u6d17\u673a\u3001\u5168\u81ea\u52a8\u6676\u5706\u5237\u6d17\u673a\u3001\u5168\u81ea\u52a8\u4e0a\u8721\u673a\u548c\u8f6e\u5ed3\u4eea\u7b49\u3002<\/p>\n

\u4ece\u4ea7\u54c1\u4e0a\u770b\uff0c\u5728\u5927\u7845\u7247\u9886\u57df\uff0c\u6c5f\u82cf\u6676\u5de5\u5df2\u6210\u529f\u63a8\u51fa12\u82f1\u5bf8\u6676\u5706\u5012\u89d2\u8bbe\u5907\u548c\u6280\u672f\u65b9\u6848\uff0c\u6709\u6548\u89e3\u51b3\u4e86\u5927\u5c3a\u5bf8\u7845\u7247\u52a0\u5de5\u96be\u9898\uff1b\u5728\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u78b3\u5316\u7845\u9886\u57df\uff0c\u6c5f\u82cf\u6676\u5de5\u4e13\u6ce8\u4e8e\u4e3a6\u82f1\u5bf8\u30018\u82f1\u5bf8\u53ca\u975e\u6807\u51c6\u76f4\u5f84\u5c3a\u5bf8\u7684\u78b3\u5316\u7845\u886c\u5e95\u63d0\u4f9b\u5012\u89d2\u3001\u6e05\u6d17\u8bbe\u5907\u53ca\u914d\u5957\u5de5\u827a\u3002\u6b64\u5916\uff0c\u636e\u6089\u6c5f\u82cf\u6676\u5de5\u5df2\u4e0e\u6b27\u6d32\u67d0\u4e9b\u886c\u5e95\u5382\u5bb6\u7b7e\u8ba2\u5168\u81ea\u52a8\u6676\u5706\u5012\u89d2\u673a\u7684\u5408\u540c\u3002<\/p>\n

\u4e13\u5229\u65b9\u9762\uff0c\u76ee\u524d\uff0c\u6c5f\u82cf\u6676\u5de5\u901a\u8fc7\u4e0e\u5c71\u4e1c\u5927\u5b66\u7b49\u5f00\u5c55\u4ea7\u5b66\u7814\u5408\u4f5c\uff0c\u5df2\u7533\u8bf7\u4ea7\u54c1\u76f8\u5173\u4e13\u522919\u9879\uff0c\u5df2\u83b7\u5f97\u6388\u6743\u53d1\u660e\u4e13\u52291\u9879\uff0c\u5b9e\u7528\u65b0\u578b\u4e13\u52294\u9879\uff0c\u7814\u53d1\u768412\u82f1\u5bf8\u5168\u81ea\u52a8\u5012\u89d2\u673aMET-5800\uff0c\u6253\u7834\u56fd\u5185\u5927\u7845\u7247\u5012\u89d2\u673a\u8fdb\u53e3\u5784\u65ad\u7684\u5c40\u9762\uff0c\u5168\u81ea\u52a8\u5012\u89d2\u673aMET-5600\u6210\u529f\u66ff\u4ee3\u65e5\u672c\u8fdb\u53e3\u7684\u5012\u89d2\u673a\u3002<\/p>\n

\u65b0\u6d01\u80fd\uff1aSiC\/GaN\u529f\u7387\u5668\u4ef6\u53ca\u5c01\u6d4b\u7814\u53d1\u53ca\u4ea7\u4e1a\u5316\u9879\u76ee\u5ef6\u671f<\/strong><\/p>\n

8\u670813\u65e5\uff0c\u65b0\u6d01\u80fd\u53d1\u5e03\u516c\u544a\u79f0\uff0c\u62df\u5c06\u6b64\u524d\u52df\u6295\u9879\u76ee\u4e2d\u7684\u201c\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53 SiC\/GaN \u529f\u7387\u5668\u4ef6\u53ca\u5c01\u6d4b\u7684\u7814\u53d1\u53ca\u4ea7\u4e1a\u5316\u201d\u9879\u76ee\u8fbe\u5230\u9884\u5b9a\u53ef\u4f7f\u7528\u72b6\u6001\u65e5\u671f\u5ef6\u671f\u81f32025\u5e748\u6708\u3002\u6b64\u6b21\u5ef6\u671f\u662f\u53d7\u5b8f\u89c2\u73af\u5883\u7b49\u4e0d\u53ef\u63a7\u56e0\u7d20\u7684\u5f71\u54cd\uff0c\u9879\u76ee\u7684\u5de5\u7a0b\u5efa\u8bbe\u3001\u8bbe\u5907\u91c7\u8d2d\u53ca\u4eba\u5458\u5b89\u6392\u7b49\u76f8\u5173\u5de5\u4f5c\u8fdb\u5ea6\u5747\u53d7\u5230\u4e00\u5b9a\u7a0b\u5ea6\u7684\u5f71\u54cd\uff0c\u65e0\u6cd5\u5728\u8ba1\u5212\u65f6\u95f4\u5185\u5b8c\u6210\u3002<\/p>\n

\u636e\u6089\uff0c\u6b64\u6b21\u5ef6\u671f\u9879\u76ee\u5c5e\u65b0\u6d01\u80fd\u4e8c\u5382\u533a\u6269\u5efa\u9879\u76ee\uff0c\u9879\u76ee\u603b\u6295\u8d44\u7ea62.23\u4ebf\u5143\uff0c2022\u5e74\u5f00\u5efa\uff0c\u539f\u8ba1\u52122024\u5e74\u5efa\u8bbe\u5b8c\u6210\u3002\u9879\u76ee\u5efa\u6210\u540e\uff0c\u5c06\u5b9e\u73b0\u5e74\u4ea7 SiC\/GaN \u529f\u7387\u5668\u4ef62640\u4e07\u53ea\u3002<\/p>\n

\u65b0\u6d01\u80fd\u79f0\uff0c\u672c\u6b21\u52df\u6295\u9879\u76ee\u5ef6\u671f\u4ec5\u6d89\u53ca\u9879\u76ee\u8fdb\u5ea6\u7684\u53d8\u5316\uff0c\u4e0d\u4f1a\u5bf9\u9879\u76ee\u7684\u5b9e\u65bd\u9020\u6210\u5b9e\u8d28\u6027\u5f71\u54cd\uff0c\u4e5f\u4e0d\u4f1a\u5bf9\u516c\u53f8\u7684\u6b63\u5e38\u7ecf\u8425\u4ea7\u751f\u91cd\u5927\u5f71\u54cd\u3002<\/p>\n

\u6b64\u524d\uff0c\u65b0\u6d01\u80fd\u53d1\u5e03\u534a\u5e74\u62a5\uff0c2024\u4e0a\u534a\u5e74\u516c\u53f8\u5b9e\u73b0\u8425\u4e1a\u6536\u51658.73\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f15.16%\uff1b\u5f52\u5c5e\u4e8e\u4e0a\u5e02\u516c\u53f8\u80a1\u4e1c\u7684\u51c0\u5229\u6da6\u4e3a2.18\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f47.45%\u3002<\/p>\n

\u65b0\u6d01\u80fd\u8868\u793a\uff0c2024\u5e74\u6625\u8282\u4ee5\u6765\uff0c\u4e0b\u6e38\u5e02\u573a\u9010\u6b65\u6062\u590d\uff0c\u65b0\u5174\u5e94\u7528\u9886\u57df\u9700\u6c42\u663e\u8457\u589e\u52a0\uff0c\u516c\u53f8\u5e93\u5b58\u52a0\u901f\u6d88\u5316\uff0c\u90e8\u5206\u4ea7\u54c1\u51fa\u73b0\u4e86\u4f9b\u4e0d\u5e94\u6c42\u751a\u81f3\u6301\u7eed\u52a0\u5355\u7684\u60c5\u51b5\u3002\u516c\u53f8\u654f\u9510\u628a\u63e1\u5e02\u573a\u884c\u60c5\uff0c\u53ca\u65f6\u4e86\u89e3\u548c\u79ef\u6781\u54cd\u5e94\u5ba2\u6237\u9700\u6c42\u53d8\u5316\uff0c\u63d0\u524d\u52a0\u5927\u6392\u4ea7\uff0c\u6ee1\u8db3\u5e02\u573a\u65b0\u589e\u9700\u6c42\uff0c\u8fdb\u800c\u63a8\u52a8\u4e1a\u7ee9\u7a33\u6b65\u589e\u957f\u3002<\/p>\n

\u4ea7\u54c1\u8fdb\u5ea6\u65b9\u9762\uff0c\u6839\u636e\u534a\u5e74\u62a5\uff0c\u65b0\u6d01\u80fd\u82af\u7247\u4ea7\u54c1\u4e3b\u8981\u7531\u516c\u53f8\u5b8c\u6210\u4ea7\u54c1\u8bbe\u8ba1\u65b9\u6848\u540e\uff0c\u4ea4\u7531\u82af\u7247\u4ee3\u5de5\u4f01\u4e1a\u8fdb\u884c\u751f\u4ea7\uff1b\u529f\u7387\u5668\u4ef6\u4ea7\u54c1\u4e3b\u8981\u7531\u516c\u53f8\u901a\u8fc7\u5b50\u516c\u53f8\u4ee5\u53ca\u59d4\u6258\u5916\u90e8\u5c01\u88c5\u6d4b\u8bd5\u4f01\u4e1a\u5bf9\u82af\u7247\u8fdb\u884c\u5c01\u88c5\u6d4b\u8bd5\u800c\u6210\u3002\u8be5\u516c\u53f8\u5168\u8d44\u5b50\u516c\u53f8\u7535\u57fa\u96c6\u6210\u5df2\u5efa\u8bbe\u5148\u8fdb\u5c01\u6d4b\u4ea7\u7ebf\u5e76\u6301\u7eed\u6269\u5145\u5b8c\u5584\uff0c\u76ee\u524d\u5df2\u5b9e\u73b0\u90e8\u5206\u82af\u7247\u81ea\u4e3b\u5c01\u6d4b\u5e76\u5f62\u6210\u7279\u8272\u4ea7\u54c1\uff1b\u5b50\u516c\u53f8\u91d1\u5170\u534a\u5bfc\u4f53\u5df2\u5efa\u6210\u5148\u8fdb\u529f\u7387\u6a21\u5757\u751f\u4ea7\u7ebf\uff0c\u4ee5\u6ee1\u8db3\u5149\u4f0f\u50a8\u80fd\u3001\u6c7d\u8f66\u7b49\u91cd\u70b9\u5e94\u7528\u9886\u57df\u5ba2\u6237\u7684\u9700\u6c42\u3002<\/p>\n

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